All HMS facility microfluidics/microfabrication facility users are required to acknowledge the facility in any publications or presentations that result from work performed in whole or in part in the HMS microfluidics/microfabrication facility, or with assistance from our staff.

All the HMS Microfabrication facility users must follow all applicable Harvard University policies in addition to:

  • Users must take Harvard's Enviromental Health and Safety (EH&S) Basic Lab Safety Training in order to have access to our facility. Please see the EH&S website for information regarding training schedules
  • Absolutely no food or beverages are allowed in the facility.
  • We reserve the right to prohibit further use of facilities, if our staff and committee members believe that an user is not properly trained or is working in an unsafe manner.
  • Facility users must wear closed toe shoes, follow the gowning procedure and chemical safety rules.
  • All users have to swipe in everytime they access to the facility and swipe out when they leave. Users are prohibited from accessing to the facility with any other user HUID. We reserve the right to deny future access to any user who willfully violates this policy.
  • If you wish to bring any chemicals or biological materials into the facility that is not listed in our website, please notify facility director and staff in advance by email.
Protocols
PDMS/Glass Bonding ProtocolProtocol
Dilution of PDMS in Toulene ProtocolProtocol
SU 8 Photoresist Master Fabrication ProtocolProtocol
Silanization of Photoresist Master ProtocolProtocol & SOP
Solvent Wafer Cleaning ProtocolProtocol
PDMS Pattern Mold ProtocolProtocol

User Dress Code

  • Wear safety garments/coverall and gloves when accessing to the cleanroom.
  • Wear safety glasses when handling chemicals and other hazard materials.
  • No sleeveless shirts are allowed inside the facility (hort-sleeve shirt is acceptable).
  • No short skirts in the cleanroom.
  • No slippers, sandals or open-toed shoes are allowed.
  • Do not wear jewelry with sharp-points that can puncture through rubber gloves.
  • Do not unzip your coverall for any circumstances while you are in the cleanroom. All the tools or material to be used should be carried outside the coverall.
Safety ProcedureInstructions
Gowning ProcedureInstructions
Liquid Nitrogen HandlingInstructions

Chemical and Reagents

SolventsPhotoresistsprimerspdms
AcetoneSU-8 SeriesMCC 80/20 Microposit Primer (HDMS)Dow Corning Sylgard 184
AZ 400K DeveloperSu-8 2000 SeriesSylgard Primer Coat
CyclohexaneMicroposit S1822
EthanolMicroposit S1805
Isopropanol

Methanol

SU 8 Developer

Heptane
Hexane
Triethalamine
Ethyl Acetate
Triethylamine
Tridecafluoro-Tetrahydrooctyl-Trichlorosilane