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All HMS facility microfluidics/microfabrication facility users are required to acknowledge the facility in any publications or presentations that result from work performed in whole or in part in the HMS microfluidics/microfabrication facility, or with assistance from our staff.

All the HMS Microfabrication facility users must follow all applicable Harvard University policies in addition to:

  • Users must take Harvard's Enviromental Health and Safety (EH&S) Basic Lab Safety Training in order to have access to our facility. Please see the EH&S website for information regarding training schedules 
  • Absolutely no food or beverages are allowed in the facility.
  • We reserve the right to prohibit further use of facilities, if our staff and committee members believe that an user is not properly trained or is working in an unsafe manner.
  • Facility users must wear closed toe shoes, follow the gowning procedure and chemical safety rules.
  • All users have to swipe in everytime they access to the facility and swipe out when they leave. Users are prohibited from accessing to the facility with any other user HUID. We reserve the right to deny future access to any user who willfully violates this policy.
  • If you wish to bring any chemicals or biological materials into the facility that is not listed in our website, please notify facility director and staff in advance by email.



PDMS/Glass Bonding Protocol Protocol
Dilution of PDMS in Toulene Protocol Protocol
SU 8 Photoresist Master Fabrication Protocol Protocol
Silanization of Photoresist Master Protocol               Protocol & SOP
Solvent Wafer Cleaning Protocol Protocol
PDMS Pattern Mold Protocol Protocol


User Dress Code

  • Wear safety garments/coverall and gloves when accessing to the cleanroom.
  • ​Wear safety glasses when handling chemicals and other hazard materials.
  • No sleeveless shirts are allowed inside the facility (hort-sleeve shirt is acceptable).
  • No short skirts in the cleanroom.​
  • No slippers, sandals  or open-toed shoes are allowed.
  • Do not wear jewelry with sharp-points that can puncture through rubber gloves.
  • Do not unzip your coverall for any circumstances while you are in the cleanroom. All the tools or material to be used should be carried outside the coverall.

Safety Procedure


Gowning Procedure Instructions
Liquid Nitrogen Handling Instructions

Chemical and Reagents







SU-8 Series

MCC 80/20 Microposit Primer (HDMS)

Dow Corning Sylgard 184

AZ 400K Developer

Su-8 2000 Series

Sylgard Primer Coat



Microposit S1822




Microposit S1805








SU 8 Developer
















Ethyl Acetate